Vacuum System Control of Vacuum Furnace

Conventional control of vacuum system of three-stage pump of vacuum furnace, the main control circuits of mechanical pump, Roots pump and diffusion pump are equipped with imported air switch to protect the circuit, and the imported AC contactor is used as control output.

Vacuum measurement adopts domestic high-quality digital vacuum gauge, which has strong anti-interference ability and fast reaction speed. A high-vacuum gauge and a low-vacuum gauge measure the high and low vacuum degree in the vacuum chamber respectively, and send the measured value to the vacuum gauge to display, and output the set signal to the PLC to control the vacuum system. The pneumatic valve of the vacuum system is controlled by a high-quality solenoid valve through a pneumatic source. The electric signal has the output of plc, which can be manually and automatically controlled. According to the process and the vacuum gauge signal, the interlock can be realized.

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